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Smif Versaport Has Been Exported Overseas

Min. Order:	2 Pieces
Port:	Shanghai, China
Production Capacity:	Hundreds of Units in Stockhundreds Produced Annual
Payment Terms:	L/C, T/T

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Product Description

Company Info

Basic Info.

Model NO.

ASYST

Application

Wafer Transfer

Trademark

HONGHU

Transport Package

Fixed on Wooden Boards, Packaged in Wooden Boxes,

Origin

China

Product Description

	Platform Mount	BOLTS Configuration
Wafer Size	200mm	200mm
Height	488.95mm	1385mm
Width	370.84mm	BOLTS interface = 470mm
Depth	396.24mm	415.3mm
Weight	15.87 Kg	56.70 Kg
Port Plate Height while operating	448.31mm from base	1188.5mm
Port Plate Height at Home position	158.75mm	900mm
Speed	76.2mm per second
Mounting	Customer-supplied mounting platform	Direct mount to Process Tool
Power	24 vdc (+10%, -5%) from external source 1.5 Amps standby 3.0 Amps typical during operation 4.0 Amps maximum
Laser	Diode laser; Wavelength = 670nmLaser Power <1mW (Class II)NOTE- VersaPort is a Class I laser product when used with a SMIF-Pod.
Communications	Serial RS-233C, SECSI/II, ASCII, Parallel
Environmental	Operating Temperature 10°to 40° COperating Humidity 10%- 75%Storage Temperature -10° to +55° CStorage Humidity 5%- 90%

characteristics:
Compatible with 200mm POD and open castte crystal boxes;
Accurate and reliable motion control, capable of opening, closing, and sealing the conveyor door Automatic fault prevention device, including cassette slot/wafer mapping, stack detection, wafer protrusion sensing, and automatic wafer repositioning;
SMART TAG Traceable Identification System for Wafer Boxes and Wafers ;
Integrated self inspection diagnosis and advanced diagnostic software for easy design and troubleshooting;
Advantages:
Localization of components, short delivery time, and stable supply;
Localized professional technical service team with quick response;

Transmission cycle<90s; Repositioning accuracy of 0.127mm;
The cleanliness level is superior to Class 1;
Direction error<0.2mm;
Mature and stable Interlock system;
Wafer Traceable Identification System SMART TAG;
Integrated self diagnosis and advanced diagnostic software for easy design and troubleshooting;

Address: Room 104, 1f, Building 4, No. 88 Yuanhe Wanli Road, Xiangcheng District, Suzhou, Jiangsu, China

Business Type: Manufacturer/Factory

Business Range: Arts & Crafts, Industrial Equipment & Components, Manufacturing & Processing Machinery, Metallurgy, Mineral & Energy

Main Products: Implant graphite

Company Introduction: we are an ion imolant graphite company in China. we can supply all ion-implanter consumables available.

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